Ozone is BAD. It rots rubber, and is a free radical which promotes oxidation, and is bad for your health.
After steam cleaning, I agree, leave the area as open as you can so things dry well.
The steam vapor cleaners use surprisingly little water. It is the heat and pressure that do most of the work.

The following is a quote from the EPA regarding use of ozone for odors.

Available scientific evidence shows that at concentrations that do not exceed public health standards, ozone has little potential to remove indoor air contaminants.

Here is the reference:
http://www.epa.gov/iaq/pubs/ozonegen.html